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TRANSPARENT PZT MIM CAPACITORS ON GLASS FOR PIEZOELECTRIC TRANSDUCER APPLICATIONS
This paper reports on the realization and characterization of a fully transparent
Pb(Zr0.52,Ti0.48)O3 (PZT) based MIM capacitor on glass substrate for piezoelectric transducer applications. A PZT film grown on a 200 mm Si substrate was layer transferred to a…En afficher davantage-
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